Piezoelectric impact force sensor array for tribological research on rigid disk storage media

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 294-299

  Burger, G J ^a   Lammerink, T S J ^a   Fluitman, J H J ^a   Imai, S ^a   Tokuyama, M ^a   Hirose, S ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; ELASTIC WAVES; ELECTRODES; MECHANICAL PROPERTIES; PIEZOELECTRIC MATERIALS; SENSORS; THIN FILMS;

PIEZOELECTRIC THIN FILM SENSOR ARRAY; RIGID DISK STORAGE DEVICE; SLIDER DISK INTERFACE;

PIEZOELECTRIC DEVICES;

EID: 0029178844     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)