Thermally driven microvalve with buckling behaviour for pneumatic applications

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 13-17

  Lisec, T ^a   Hoerschelmann, S ^a   Quenzer, H J ^a   Wagner, B ^a   Benecke, W ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BRIDGE CIRCUITS; BUCKLING; FINITE ELEMENT METHOD; FLOW OF FLUIDS; MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; PNEUMATICS; SEMICONDUCTING SILICON; SWITCHING; THERMOMECHANICAL TREATMENT; VALVES (MECHANICAL);

BUCKLING EFFECT; MICROVALVE; SWITCHING TIME; THERMOMECHANICAL BEHAVIOUR;

MICROELECTROMECHANICAL DEVICES;

EID: 0027931978     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)