A planar microfabricated fluid filter

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 704-708

  Brody, James P ^a   Osborn, Thor D ^a   Forster, Fred K ^b   Yager, Paul ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

^b NONE   (United States)

Author keywords

Fluid filters; Microfluidic; Surface tension

Indexed keywords

EID: 0001520454     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80042-8     Document Type: Article

References (8)

1. G. Kittilsand, G. Stemme and B. Norden, A sub-micron particle filter in silicon, Sensors and Actuators, A21-A23 (1990) 904-907.
2. P. Wilding, J. Pfahler, H.H. Bau, J.N. Zemel and L.J. Kricka, Manipulation and flow of biological fluids in straight channels micromachined in silicon, Clin. Chem., 40 (1994) 43-47.
3. G. Stemme and G Kittilsland, New fluid filter structure in silicon using a self-aligning technique, Appl. Phys. Lett., 53 (1988) 1566-1568.
4. P. Gravesen, J. Branebjerg and O.J. Jensen Microfluidics - a review, Micromech. Microeng., 3 (1993) 168-182.
5. E.M. Purcell, Life at low Reynolds number, Am. J. Phys., 45 (1977) 3-11.
6. G.K. Batchelor, An Introduction to Fluid Dynamics. Cambridge University Press, 1967.
7. A. Reisman, M. Berkenblit, S. Chan, F.B. Kaufman and D.C. Green. The controlled etching of silicon in catalyzed ethylene diamine-pyrocatechol-water solutions, J. Electrochem. Soc., 126 (1979) 1406-1415.
8. G. Wallis and D.I. Pomerantz, Field assisted glass metal sealing, J. Appl. Phys., 40 (1969) 3946-3949.