Electromagnetic linear actuators with inductive position sensing

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 386-391

  Guckel, H ^a   Earles, T ^a   Klein, J ^a   Zook, J D ^b,c   Ohnstein, T ^b,c  

^a University of Wisconsin Madison   (United States)

^b HONEYWELL   (United States)

^c HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

Actuators; Magnetic drive; Position sensing

Indexed keywords

EID: 0000615126     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01137-5     Document Type: Article

References (7)

1. H. Guckel, T.R. Christenson, T. Earles, J. Klein, J.D. Zook, T. Ohnstein and M. Karnowski, Laterally driven electromagnetic actuators, Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 13-16 June, 1994, pp. 49-52.
2. H. Guckel, K.J. Skrobis, T.R. Christenson, J. Klein, S.I. Han, B. Choi, E.G. Lovell and T.W. Chapman, Fabrication and testing of the planar magnetic micromotor, J. Micromech. Microeng., 1 (1991) 135-138.
3. T.R. Christenson, J. Klein and H. Guckel, An electromagnetic micro dynamometer, Proc. IEEE Micro Electro Mechanical Systems, Amsterdam, Netherlands, 29 Jan.-2 Feb., 1995, pp. 386-391.
4. S. Timoshenko and G.H. MacCullough, Elements of Strength of Materials, Van Nostrand, New York, 2nd edn., 1940.
5. E.W. Becker, W. Ehrfeld, P. Hagman, A. Maner and D. Münchmeyer, Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvano-forming, and plastic moulding, Microelectronic Eng., 4 (1986) 35-56.
6. H. Guckel, K.J. Skrobis, J. Klein, T.R. Christenson and T. Wiegele, Deep X-ray lithography for micromechanics, Proc. SPIE Int. Symp. on Holography, Microstructures and Laser Technologies, Quebec City, Canada, 15-21 August, 1993, pp. 290-297.
7. D.E. Gray (ed.), American Institute of Physics Handbook, McGraw-Hill, PA, 1957, pp. 5-12.