Micro filtration membrane sieve with silicon micro machining for industrial and biomedical applications

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 83-87

  van Rijn, Cees J M ^a   Elwenspoek, Miko C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BIOMEDICAL ENGINEERING; CALCULATIONS; CHEMICAL VAPOR DEPOSITION; FILTRATION; LITHOGRAPHY; REACTIVE ION ETCHING; SIEVES; SILICON NITRIDE; SILICON WAFERS;

MICRO FILTRATION MEMBRANE SIEVE; SILICON MICROMACHINING;

MICROMACHINING;

EID: 0029181114     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)