High-power and high-efficiency electrostatic actuator

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 236-241

  Niino, Toshiki ^a   Egawa, Saku ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS;

ELECTROSTATIC ACTUATOR;

ACTUATORS;

EID: 0027147049     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)