Electrostatic lower stator axial gap wobble motor: design and fabrication

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 404-407

  Legtenberg, Rob ^a   Berenschot, Erwin ^a   van Baar, John ^a   Lammerink, Theo ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; ELECTROSTATICS; FABRICATION; MACHINE DESIGN; MATHEMATICAL MODELS; MICROMACHINING; ROTORS (WINDINGS); STATORS; TORQUE;

FOUR MASK FABRICATION PROCESS; TORQUE GENERATIONS; WOBBLE MOTOR;

ELECTRIC MOTORS;

EID: 0029542726     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)