Simple microflight mechanism on silicon wafer

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 148-152

  Shimoyama, Isao ^a   Kubo, Yayoi ^a   Kaneda, Tomoyuki ^a   Miura, Hirofumi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; DENSITY (SPECIFIC GRAVITY); DRAG; DYNAMICS; GRAVITATION; KINEMATICS; MICROSTRUCTURE; ROBOTICS; SEMICONDUCTING SILICON; THREE DIMENSIONAL; VISCOUS FLOW;

ARTIFICIAL FLYING INSECT; MICROFLIGHT MECHANISM; SCALE EFFECT; SILICON WAFER; VISCOUS AIR FLOW;

MICROELECTROMECHANICAL DEVICES;

EID: 0028058576     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)