Fabrication of 3-dimensionally shaped Si diaphragm dynamic focusing mirror

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 30-35

  Hisanaga, Michio ^a   Koumura, Tsukasa ^a   Hattori, Tadashi ^a  

^a DENSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD;

DYNAMIC FOCUSING MIRROR; SILICON DIAPHRAGM;

MIRRORS;

EID: 0027270690     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)