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Volumn 1, Issue , 1995, Pages 340-343
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Micromachined devices for optical applications
a
a
DAIMLER AG
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
DRY ETCHING;
ION BEAMS;
MICROELECTRONIC PROCESSING;
OPTICAL DEVICES;
OPTICAL FIBERS;
SEMICONDUCTOR DEVICES;
SEMICONDUCTOR LASERS;
SILICON WAFERS;
SUBSTRATES;
MICROMACHINED DEVICES;
MICROSYSTEMS;
OPTICAL APPLICATIONS;
OPTOELECTRONICAL SYSTEMS;
OPTOMECHANICAL SYSTEMS;
SEMICONDUCTOR CHIP AREA;
MICROELECTROMECHANICAL DEVICES;
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EID: 0029488999
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (12)
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