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Volumn , Issue , 1994, Pages 235-240
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Characteristics of an electrostatically-driven gas valve under high-pressure conditions
a
a
HITACHI LTD
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
ATMOSPHERIC PRESSURE;
CHEMICAL VAPOR DEPOSITION;
ELECTRONIC EQUIPMENT;
ELECTROSTATICS;
FLOW OF FLUIDS;
MICROMACHINING;
MOLECULAR BEAM EPITAXY;
SEMICONDUCTOR DEVICES;
SENSORS;
THERMAL EXPANSION;
ELECTROSTATIC FORCE;
ELECTROSTATICALLY DRIVEN GAS VALVE;
GAS FLOW;
INTELLIGENT MICROMECHANICAL SYSTEM;
PIEZOELECTRIC VALVE;
RAREFIED GAS CONDITION;
VALVES (MECHANICAL);
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EID: 0028112828
PISSN: None
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (15)
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References (6)
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