Outer rotor surface-micromachined wobble micromotor

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 161-166

  Furuhata, T ^a   Hirano, T ^a   Lane, L H ^a   Fontana, R E ^a   Fan, L S ^a   Fujita, H ^a  

^a Tokyo Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ROTORS (WINDINGS); STATORS;

ELECTROSTATIC WOBBLE MICROMOTOR; MASK FABRICATION SEQUENCE; MICROMOTOR;

ELECTRIC MOTORS;

EID: 0027310092     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)