Micromachined permalloy magnetic actuator array for micro robotics assembly systems

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 328-331

  Liu, Chang ^a   Tsao, Thomas ^a   Tai, Yu Chong ^a   Liu, Wenheng ^a   Will, Peter ^a   Ho, Chih Ming ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ELECTROPLATING; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING; ROBOTIC ASSEMBLY; SEMICONDUCTING SILICON; SUPPORTS;

MAGNETIC FIELD LINES; MICRO ROBOTICS ASSEMBLY SYSTEMS; PERMALLOY MAGNETIC ACTUATOR ARRAY; POLY SILICON BENDING SUPPORTS; SYNCHRONOUS DRIVING MODE;

ACTUATORS;

EID: 0029489895     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)