Piezoelectric cantilever array for multiprobe scanning force microscopy

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 451-455

  Itoh, Toshihiro ^a   Ohashi, Takahiro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; PIEZOELECTRIC MATERIALS; RESONANCE; SEMICONDUCTING FILMS; ZINC OXIDE;

MECHANICAL RESONANCE; MULTIPROBE SCANNING FORCE MICROSCOPY; PIEZOELECTRIC CANTILEVER; Z AXIS ACTUATOR;

PIEZOELECTRIC DEVICES;

EID: 0029771090     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)