Micropump fabricated with the LIGA process

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages

  Rapp, R ^a   Bley, P ^a   Menz, W ^a   Schomburg, W K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; TITANIUM;

LIGA PROCESS; MICROPUMP;

PUMPS;

EID: 0027147051     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)