Fully batch fabricated magnetic microactuators using a two layer LIGA process

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 320-323

  Rogge, B ^a   Schulz, J ^a   Mohr, J ^a   Thommes, A ^a   Menz, W ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ASPECT RATIO; ELECTRIC RELAYS; IRON ALLOYS; MAGNETIC PERMEABILITY; MASKS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; NICKEL ALLOYS; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; X RAY LITHOGRAPHY;

ELECTROMAGNETIC LINEAR ACTUATORS; FULL BATCH PROCESSING; MAGNETIC MICROACTUATORS; MASK PROCESS; MICRORELAY; OPTICAL LITHOGRAPHY LAYERS; PERMALLOY; X RAY LITHOGRAPHY LAYERS;

ACTUATORS;

EID: 0029512668     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)