Integrated force arrays

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 149-154

  Bobbio, Stephen M ^a   Kellam, Mark D ^a   Dudley, Bruce W ^a   Goodwin Johansson, Scott ^a   Jones, Susan K ^a   Jacobson, James D ^a   Tranjan, Farid M ^a   DuBois, Thomas D ^a  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES;

INTEGRATED FORCE ARRAYS;

MEMBRANES;

EID: 0027310093     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)