Single-mask processing of micromechanical piercing structures using ion milling

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 48-52

  Dizon, Roberto ^a   Han, Honatao ^a   Reed, Michael L ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MASKS;

ION MILLING; MICROMECHANICAL PIERCING STRUCTURES; MICROSTRUCTURES; SINGLE-MASK PROCESSING; STENCIL MASK PATTERN; TISSUE FASTENERS;

ELECTROMECHANICAL DEVICES;

EID: 0027270689     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)