Fluid driven microactuator with feedback mechanism

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 213-218

  Ikei, Yasushi ^a   Koga, Akihiro ^a   Morikawa, Hisashi ^a   Okawa, Yoshikuni ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTROSTATICS;

FEEDBACK MECHANISM; FLUID DRIVEN MICROACTUATOR;

ACTUATORS;

EID: 0027242425     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)