Surface micromachined microengine as the driver for micromechanical gears

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 365-368

  Garcia, Ernest J ^a   Sniegowski, Jeffry J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; GEARS; MICROMACHINING; ROTATING MACHINERY; TRANSMISSIONS;

ELECTROSTATIC COMB DRIVE ACTUATORS; GEARED SHUTTER MECHANISM; MICROENGINE; MICROMECHANICAL GEARS;

MECHANICAL DRIVES;

EID: 0029511839     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)