Evaluation of the micro wobble motor fabricated by concentric build-up process

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 374-379

  Nakamura, K ^a   Ogura, H ^a   Maeda, S ^a   Sangawa, U ^a   Aoki, S ^a   Sato, T ^a  

^a Matsushita Research Institute Tokyo Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; ELECTRODES; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PARAMETER ESTIMATION; ROTORS; SHAFTS (MACHINE COMPONENTS); STATORS; SUBSTRATES; THREE DIMENSIONAL; TORQUE;

CONCENTRIC BUILD UP PROCESS; MICRO WOBBLE MOTOR; MICROFABRICATION; ROTATION RATE; STATOR ELECTRODE;

ELECTRIC MOTORS;

EID: 0029179035     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)