Multi-layered fabrication of microstructures and thin film transistors - application to polycrystalline silicon field emitters controlled by TFTs

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 49-54

  Hashiguchi, Gen ^a   Mimura, Hidenori ^a   Fujita, Hiroyuki ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; GATES (TRANSISTOR); MICROMACHINING; MICROSTRUCTURE; MULTILAYERS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE; SUBSTRATES;

DISSOLVING PROCESSES; MICROELECTROMECHANICAL SYSTEMS; POLYCRYSTALLINE SILICON FIELD EMITTER ARRAY; WAFER BONDING;

THIN FILM TRANSISTORS;

EID: 0029734869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)