Development and characterization of micro-mechanical gratings for optical modulation

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 222-297

  Sene, Darren E ^a   Grantham, Jeffrey W ^a   Bright, Victor M ^a   Comtois, John H ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTOOPTICAL DEVICES; ACTUATORS; ELECTRODES; ELECTROSTATIC DEVICES; LIGHT MODULATION; LIGHT MODULATORS; OPTICAL INTERCONNECTS; Q SWITCHED LASERS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; SWITCHES;

ELECTROSTATIC GRATINGS; GRATING LIGHT VALVE; MICROELECTRO MECHANICAL GRATINGS; SCANNING ELECTRON MICROGRAPH; THERMAL ACTUATORS;

DIFFRACTION GRATINGS;

EID: 0029732346     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)