Miniaturised fabry perot AFM sensor

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 660-663

  Ruf, A ^a   Abraham, M ^a   Lacher, M ^a   Mayr, K ^a   Zetterer, Th ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DIFFRACTION GRATINGS; ETCHING; FABRY-PEROT INTERFEROMETERS; MIRRORS; NICKEL; SIGNAL INTERFERENCE; THIN FILMS;

FABRY PEROT CANTILEVER; MICROOPTICAL BENCH; PERIODICITY; PIEZO TUBE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

SENSORS;

EID: 0029545769     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)