Transverse mode electrostatic microactuator for MEMS-based HDD slider

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 216-221

  Imamura, Takahiro ^a   Koshikawa, Takao ^a   Katayama, Masaki ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EQUIPMENT TESTING; ELECTROPLATING; ELECTROSTATIC DEVICES; FABRICATION; HARD DISK STORAGE; MAGNETIC HEADS; MECHANICAL DRIVES; NATURAL FREQUENCIES;

ELECTROMAGNETIC MICROACTUATORS; HARD DISK DRIVES; TRANSVERSE MODE ELECTROSTATIC MICROACTUATORS;

ACTUATORS;

EID: 0029755924     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)