System design for cooperative control of arrayed microactuators

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 322-327

  Konishi, Satoshi ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; FABRICATION; INTEGRATED CIRCUITS; MICROMACHINING; MOTION CONTROL; PROBLEM SOLVING; SENSORS; SERVOMECHANISMS;

AUTONOMOUS DISTRIBUTED MICROMACHINES; CONVEYANCE SYSTEM; COOPERATIVE CONTROL; FLUIDIC MICRO ACTUATOR ARRAY; TWO DIMENSIONAL ARRAY;

MICROELECTROMECHANICAL DEVICES;

EID: 0029191568     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)