Distributed electrostatic micro actuator

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 18-23

  Yamaguchi, Motoharu ^a   Kawamura, Shuji ^a   Minami, Kazuyuki ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FINITE ELEMENT METHOD;

ELECTROSTATIC MICRO ACTUATOR; MICRO ACTUATOR;

ACTUATORS;

EID: 0027201361     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)