Bidirectional silicon micropump

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 19-24

  Zengerle, R ^a   Kluge, S ^a   Richter, M ^a   Richter, A ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CHEMICAL ANALYSIS; DIAPHRAGMS; ELECTRIC FIELDS; ELECTROSTATIC DEVICES; ELECTROSTATICS; MICROMACHINING; NATURAL FREQUENCIES; PHASE SHIFT; PRESSURE; VALVES (MECHANICAL);

BIDIRECTIONAL SILICON MICROPUMP; DIAPHRAGM PUMPS; DISPLACEMENT UNIT; FLAP VALVE; FLUID HANDLING; HYDROSTATIC BACK PRESSURE; MICROMACHINED PUMPS; PASSIVE CHECK VALVES; UNIDIRECTIONAL PUMPS;

PUMPS;

EID: 0029190183     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)