Flexible microgripper and its application to micro-measurement of mechanical and thermal properties

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 406-411

  Suzuki, Yoshihiko ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CELL MEMBRANES; ELASTICITY; ELECTRIC CONDUCTIVITY; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; THERMAL VARIABLES MEASUREMENT; THERMOCOUPLES; THERMODYNAMIC PROPERTIES;

FLEXIBLE MICROGRIPPER; INTEGRATED MICROTHERMOCOUPLE; MICROFINGER; SEA URCHIN EGG;

GRIPPERS;

EID: 0029754597     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)