Fabrication of an electrostatic microactuator with an s-shaped film

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 426-429

  Shikida, Mitsuhiro ^a   Sato, Kazuo ^a   Harada, Takeshi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; ELECTROSTATIC DEVICES; FABRICATION; FLOW CONTROL; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; VALVES (MECHANICAL);

ELECTROSTATIC MICROACTUATORS; MICROFABRICATION; MICROMECHANICAL FLUID SYSTEMS; MICROVALVES; S SHAPED FILM; SEMICONDUCTOR MANUFACTURING EQUIPMENT;

ACTUATORS;

EID: 0029487259     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)