Quantitative analysis of scratch drive actuator using buckling motion

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 310-315

  Akiyama, Terunobu ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BUCKLING; BUSHINGS; ELECTRIC ENERGY STORAGE; ELECTROSTATIC DEVICES; SILICON; SUBSTRATES; TRANSDUCERS;

MICRO ACTUATOR; MICROMACHINED POLYSILICON ACTUATOR; POLYSILICON BUCKLING BEAM; PULSE PEAK VOLTAGE; SCRATCH DRIVE ACTUATOR; WATER SURFACE;

MICROELECTROMECHANICAL DEVICES;

EID: 0029180119     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)