Ink-jet head using diaphragm microactuator

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 418-423

  Hirata, Susumu ^a   Ishii, Yorishige ^a   Matoba, Hirotsugu ^a   Inui, Tetsuya ^a  

^a SHARP CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIAPHRAGMS; ELECTRODES; ELECTROPLATING; HEAT TRANSFER; MICROMACHINING; NICKEL; SILICON COMPOUNDS; SUBSTRATES; THERMAL EXPANSION; VELOCITY;

BUCKLING MODEL; DIAPHRAGM MICROACTUATOR; INK JET HEAD; NOZZLE PLATE;

ACTUATORS;

EID: 0029774307     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)