Nested electrostatically-actuated microvalve for an integrated microflow controller

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 7-12

  Robertson, Janet K ^a   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL EQUIPMENT; ELECTRODES; FLOW CONTROL; FLOW OF FLUIDS; FLOWMETERS; LEAKAGE (FLUID); MICROELECTRONIC PROCESSING; ON-OFF CONTROL SYSTEMS; OPTIMIZATION; PERFORMANCE; PROCESS CONTROL; VALVES (MECHANICAL);

FLOW CHANNELS; MICROFLOW CONTROLLER; MICROVALVE; ON-OFF STATES;

MICROELECTROMECHANICAL DEVICES;

EID: 0028132351     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)