Diffraction grating scanners using polysilicon micromotors

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 175-180

  Yasseen, A A ^a   Smith, S W ^a   Mehregany, M ^a   Merat, F L ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHEMICAL POLISHING; DIFFRACTION GRATINGS; ELECTROLESS PLATING; INTEGRATED CIRCUITS; LITHOGRAPHY; NUMERICAL METHODS; OPTICAL DEVICES; POLYCRYSTALLINE MATERIALS; ROTORS (WINDINGS); SCANNING; SEMICONDUCTING SILICON;

CHEMICAL MECHANICAL POLISHING; DIFFRACTION GRATING SCANNERS; HIGH ASPECT RATIO LITHOGRAPHY; POLY SILICON MICROMOTORS; POLY SILICON ROTOR;

ELECTRIC MOTORS;

EID: 0029202111     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)