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Volumn , Issue , 1995, Pages 232-237
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Fabrication of multi-layer eddy current micro sensors for non-destructive inspection of small diameter pipes
a
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Author keywords
[No Author keywords available]
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Indexed keywords
EDDY CURRENTS;
ELECTRIC COILS;
ELECTRIC RESISTANCE;
ELECTROPLATING;
GAS PIPING SYSTEMS;
MAGNETIC VARIABLES MEASUREMENT;
NONDESTRUCTIVE EXAMINATION;
OPTIMIZATION;
PHOTOLITHOGRAPHY;
SENSITIVITY ANALYSIS;
SIGNAL TO NOISE RATIO;
MAGNETIC COIL INDUCTANCE;
MICROPLANAR SPIRAL COILS;
MULTILAYER EDDY CURRENT MICROSENSORS;
NONDESTRUCTIVE INSPECTION;
SENSORS;
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EID: 0029180968
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (17)
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References (6)
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