2-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 306-309

  Ohtuka, Yoshinori ^a   Nishikawa, Hideaki ^a   Koumura, Tsukasa ^a   Hattori, Tadashi ^a  

^a DENSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); NATURAL FREQUENCIES; OPTICAL FIBER FABRICATION; OPTICAL RESONATORS; SCANNING; VIBRATIONS (MECHANICAL);

BIMORPH CELLS; ONE DIMENSIONAL SCANNING; TORSIONAL VIBRATION SYSTEM; TWO DIMENSIONAL OPTICAL SCANNER; VIBRATION ROBUST RESONATOR; VIBRATION ROBUSTNESS;

OPTICAL DEVICES;

EID: 0029181107     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)