Electrochemical micro actuator

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 106-110

  Hamberg, M W ^a   Neagu, C ^a   Gardeniers, J G E ^a   IJntema, D J ^a   Elwenspoek, M ^a  

^a ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ELECTRODES; ELECTROLYSIS; ELECTROLYTES; GASES; IONS; MICROMACHINING; PRESSURE; SEMICONDUCTING SILICON; SHORT CIRCUIT CURRENTS; SOLUTIONS;

ELECTROCHEMICAL MICRO ACTUATOR; SILICON MICROMACHINING;

ACTUATORS;

EID: 0029204405     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)