Single-crystal silicon actuator arrays for micro manipulation tasks

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 7-12

  Bohringer, Karl Friedrich ^a   Donald, Bruce Randall ^a   MacDonald, Noel C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ASPECT RATIO; CALCULATIONS; ELECTROSTATIC DEVICES; FABRICATION; MANIPULATORS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON; SINGLE CRYSTALS;

ELECTROSTATIC ACTUATOR; MICRO ASSEMBLY SYSTEM; MICRO MANIPULATION SYSTEM; MONOLITHIC ARRAYS; SINGLE CRYSTAL REACTIVE ETCHING AND METALLIZATION PROCESS;

ACTUATORS;

EID: 0029755543     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)