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Volumn , Issue , 1995, Pages 353-357
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Fabrication of electrostatic nickel microrelays by nickel surface micromachining
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Author keywords
[No Author keywords available]
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Indexed keywords
ASPECT RATIO;
ELECTRIC CONTACTS;
ELECTRIC RESISTANCE;
ELECTROLESS PLATING;
ELECTROSTATICS;
LITHOGRAPHY;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
MOLDS;
NICKEL;
POLYCRYSTALLINE MATERIALS;
SEMICONDUCTING SILICON;
CONTACT CURRENT LOADS;
ELECTROSTATIC NICKEL MICRORELAYS;
HIGH ASPECT RATIO POSITIVE RESIST LITHOGRAPHY;
METALLIC ELECTROSTATIC MICROACTUATORS;
NICKEL SURFACE MICROMACHINING;
ELECTRIC RELAYS;
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EID: 0029178841
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (29)
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References (12)
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