Speed control of elastic force motors by means of integrated piezoelectric sensors

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 124-129

  Racine, G A ^a   Beuret, C ^a   Luthier, R ^a   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEMS; ELECTRIC FREQUENCY CONTROL; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHASE LOCKED LOOPS; ROTATION; ROTORS (WINDINGS); SENSORS; SPEED CONTROL; STATORS; ULTRASONIC WAVES; VARIABLE FREQUENCY OSCILLATORS;

ELASTIC FORCE MOTORS; MECHANICAL MICROSYSTEMS; MICROMOTORS; PIEZOELECTRIC SENSORS; ROTATING STRESS FIELD; ROTATION SPEED; ROTOR REVOLUTION; SILICON MICROMACHINED STATOR;

ACTUATORS;

EID: 0028014978     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)