Miniaturised friction force measuring system for tribological research on magnetic storage devices

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 99-104

  Burger, Johannes F ^a   Burger, Gert Jan ^a   Lammerink, Theo S J ^a   Imai, Satomitsu ^a   Fluitman, Jan H J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FORCE MEASUREMENT; FRICTION; MAGNETIC DISK STORAGE; MAGNETIC HEADS; MINIATURE INSTRUMENTS; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON; SENSORS; TRIBOLOGY;

FRICTION FORCE MEASURING SYSTEM; FRICTION FORCE SENSORS; FRICTION MEASUREMENT; SILICON HEAD SLIDER SUSPENSION;

FRICTION METERS;

EID: 0029732660     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)