High-density silicon microprobe arrays for LCD pixel inspection

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 429-434

  Lee, Changyeol ^a   Kim, Yoonhyuk ^a   Choi, Yong Gie ^a   Cho, Young Ho ^a   Lee, Kwyro ^a   Kwak, Byung Man ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROPLATING; ETCHING; INSPECTION; LIQUID CRYSTAL DISPLAYS; MICROMACHINING; SILICON WAFERS;

ANISOTROPIC ETCHING; HIGH DENSITY SILICON MICROPROBE ARRAYS; INDIUM THIN OXIDE ELECTRODES; LIQUID CRYSTAL DISPLAY PIXEL INSPECTION;

PROBES;

EID: 0029732766     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)