A microelectromechanics-based frequency-signature sensor

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 288-298

  Haronian, Dan ^a,b   MacDonald, Noel C ^a  

^a Department of Materials Science and Engineering   (United States)

^b TEL AVIV UNIVERSITY   (Israel)

Author keywords

Frequency signature sensors; Microelectromechanics

Indexed keywords

EID: 0642291240     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01163-6     Document Type: Article

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