Micro mobile mechanism using thermal expansion and its theoretical analysis

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 142-147

  Yamagata, Yutaka ^a   Higuchi, Toshiro ^a   Nakamura, Naoto ^a   Hamamura, Sho ^a  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC HEATING; MECHANISMS; MICROELECTROMECHANICAL DEVICES; MOTION CONTROL; NUMERICAL ANALYSIS; PIEZOELECTRIC DEVICES; SPEED; THERMAL EXPANSION;

HEAT EMISSION RATIO; IMPACT DRIVE MECHANISM; MICRO MOBILE MECHANISM; MICROMACHINES; PIEZOELECTRIC ELEMENTS;

ACTUATORS;

EID: 0028084697     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)