Theory of manipulation and control for microfabricated actuator arrays

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 102-107

  Bohringer, Karl Friedrich ^a   Donald, Bruce R ^a   Mihailovich, Robert ^a   MacDonald, Noel C ^a  

^a Cornell Univ ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ARRAYS; CALCULATIONS; LOW TEMPERATURE OPERATIONS; MECHANICS; MICROELECTRONIC PROCESSING; SENSORS; VLSI CIRCUITS;

DISTRIBUTED MICRO MOTION SYSTEM; MICROACTUATOR ARRAY; MICROELECTROMECHANICAL STRUCTURE; MICROFABRICATED ACTUATOR ARRAY; MICROSCALE CONTACTS; MICROSENSORS; SCREAM PROCESS; TORSIONAL RESONATORS;

ACTUATORS;

EID: 0028121923     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)