Miniature gear reduction unit driven by a silicon electrostatic wobble motor

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 119-123

  Paratte, L ^a   Lorenz, H ^a   Luthier, R ^a   Clavel, R ^a   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AXLES; ELASTICITY; ELECTRODEPOSITION; FABRICATION; GEARS; MACHINE DESIGN; MICROELECTROMECHANICAL DEVICES; NICKEL; ROTORS (WINDINGS); SHAFTS (MACHINE COMPONENTS); SILICON; TORQUE;

LINK WATCH FINE MECHANICS; MINIATOR GEAR REDUCTION UNIT; PHOTORESIST MOULD; SILICON ELECTROSTATIC WOBBLE MOTORS; WOBBLING;

ACTUATORS;

EID: 0028084699     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)