Micromachined integrated optics for free-space interconnections

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 77-82

  Lin, L Y ^a   Lee, S S ^a   Wu, M C ^a   Pister, K S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRONICS PACKAGING; INTEGRATED CIRCUIT MANUFACTURE; LENSES; MICROMACHINING; MIRRORS; OPTICAL DATA STORAGE; OPTICAL SYSTEMS; OPTICS; SEMICONDUCTING SILICON; SEMICONDUCTOR LASERS; SWITCHING SYSTEMS;

BEAM SPLITTERS; FREE SPACE MICROOPTICS; MICRO FRESNEL LENSES; MICRO OPTICAL BENCH; OPTICAL SWITCHING; ROTATABLE MIRRORS; SELF ALIGNED HYBRID INTEGRATION;

INTEGRATED OPTOELECTRONICS;

EID: 0029178747     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)