Development of mass productive micro stereo lithography (mass-IH process)

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 301-306

  Ikuta, Koji ^a   Ogata, Tsukasa ^a   Tsubio, Masahiro ^a   Kojima, Syunsuke ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; MICROELECTRONIC PROCESSING; OPTICAL FIBERS; PRODUCTION ENGINEERING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

ELECTROCONDUCTIVE POLYMERS; HYBRIDIZATION; MASS PRODUCTION; MICRO CHEMICAL ANALYZER; MICRO INTEGRATED FLUID SYSTEM; MICROFABRICATION PROCESS; MICROOPTICAL FIBERS; MICROSTRUCTURES; MULTIBEAM SCANNING METHOD;

LITHOGRAPHY;

EID: 0029776909     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)