Batch fabrication of mechanical platforms for high density data storage

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 434-437

  Fan, L S ^a   Woodman, S ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; DATA STORAGE EQUIPMENT; FABRICATION; MOTORS; MULTILAYERS; PLATING; ROTORS (WINDINGS); STATORS; STRUCTURE (COMPOSITION);

BATCH FABRICATION; HIGH DENSITY DATA STORAGE; MECHANICAL PLATFORMS; STENCIL PLATING; WOBBLE MOTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0029487260     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)