FABRICATION OF MICROSTRUCTURES USING THE LIGA PROCESS.

Volumn , Issue , 1987, Pages

  Ehrfeld, W ^a   Bley, P ^a   Gotz, F ^a   Hagmann, P ^a   Maner, A ^a   Mohr, J ^a   Moser, H O ^a   Munchmeyer, D ^a   Schelb, W ^a   Schmidt, D ^a   Becker, E W ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; LITHOGRAPHY; PLASTICS - MOLDS; X-RAY APPARATUS;

DEEP-ETCH X-RAY LITHOGRAPHY; INNOVATIVE MICROSTRUCTURE PRODUCTS; LIGA PROCESS; METALLIC AND POLYMERIC MATERIALS;

MICROELECTRONICS;

EID: 0023562893     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)